The Importance of Heating System Performance in Semiconductor Manufacturing

In the rapidly evolving world of semiconductor manufacturing, maintaining precise temperature control and uniformity is crucial. From ensuring vapor uniformity within the gas delivery systems to improving energy efficiency, choosing the right heating system plays a key role in enhancing production quality and capacity. BriskHeat, with its expertise in custom heating solutions, stands ready to meet these challenges head-on.

Heated gases are critical for semiconductor manufacturing. If gas delivery piping within the production area is not heated, vapors can cool below the dew point temperature and moisture will accumulate inside the pipes. Not only can moisture cause corrosion inside the piping components, but when gas streams include particulate, particles can fall out of suspension and accumulate inside the pipe.

There are two problems associated with this:

1. Particulates can clog the pipes decreasing the flow path and potentially causing damage to components.
2. The composition of the gas stream changes as particles intended to be deposited on the wafer surface remain on the inner surface of the pipe. Lost production time as well as poor quality products result in decreased production capacity.

Not only is production capacity affected by poorly designed heaters and controls, but fabs and foundries are also under pressure to improve operational efficiency and reduce costs. Conversely, newer processes require higher gas temperatures which adds to the challenges. BriskHeat is ISO 14001: 2015 Environmental Management System certified, promoting sound environmental practices within our facility and take this into consideration when developing products shipped to our customers. The changing landscape of semiconductor manufacturing demands innovative solutions to meet these multifaceted challenges.

BriskHeat is here to help with custom-engineered cloth heating jackets and temperature control systems. Our solution development process includes:

• Client Collaboration: We carefully listen to the needs and specifications provided by our customers.
• On-site Expertise: Application engineers make on-site visits or work from engineering drawings.
• Optimized Heater Design: We determine wattage requirements and design unique heating elements for optimal temperature uniformity.
• Safe and Efficient Insulation: Insulation is selected based on application temperatures and safe-touch requirements.
• Thermal Simulation: Thermal simulation ensures the customer's heater performance goals will be met.

Our cloth heaters are available with a variety of outer facing and inner liner materials capable of meeting Class 10 (or ISO 4) cleanroom requirements. That means the heaters can be used in clean environments, where particles can be no larger than 5 microns in size, and there is a maximum of 10 particles per cubic foot with a diameter of 0.5 micrometers or less. BriskHeat started making cloth heating jackets over 70 years ago and the product line has continued to evolve with the needs of the industry. We’re proud to produce some of the most durable and reliable cloth jackets in the business, with many lasting over 10 years.

No heater can meet tight performance goals without an accurate temperature controller. The LYNX® Temperature Control System is designed to meet the challenges of our customers by providing an individual sensor and control module for each heater. This provides better temperature uniformity, which is critical to product quality. LYNX® provides total control for up to 1024 heating zones which can include not only piping fittings, but components such as valves, baffles, pumps, and chambers.

Don't miss the opportunity to see BriskHeat’s solutions in action. Visit us at SEMICON West on July 9-11 in San Francisco, South Hall Booth 253. Our team, Tony, Nick, Dan, and Herb will be there to demonstrate the LYNX® Temperature Control system and discuss the latest developments in cloth heaters. We look forward to meeting you and exploring how we can support your heating applications.

SEE YOU AT SEMICON!